Industry’s Highest-Power Microwave Generator Targets Semiconductor Plasma Apps

Reno Sub-Systems unveils the latest addition to its Precis™ Solid-State Generator portfolio. Capable of 1.6kW microwave output at 2.45GHz, the new Precis generator offers the highest-power solid-state microwave generator available for semiconductor plasma applications. The company’s approach to power generation fills a growing need for advanced subsystem technologies to keep the industry on pace with Moore’s law.

 

The Precis microwave generator delivers accurate, repeatable and stable µsec ramp times using a highly reliable solid-state architecture. The  microwave power control offers significantly better frequency control than comparable magnetron-based microwave generators. Eliminating aging magnetron technology also reduces maintenance requirements, and thereby cost of ownership. 

Industry Event

Sensors Expo & Conference

Register now and save with Early Bird Rates – Limited Passes Available!

North America’s can’t-miss event dedicated to sensors, connectivity, and IoT will take place this June 22-24 in San Jose, CA. Attendees can make connections, collaborate with experts & peers, get insight into emerging technology & trends, and find new approaches to evergreen challenges. Use promo code FE100 for $100 off Conference Passes.

 

The Precis family of generators is the latest addition to Reno’s highly differentiated Velocity™ Series EVC™ matching networks portfolio. Delivering radically better performance and process capabilities, the Velocity EVC matching network achieves ranges from 500W to 4.5kW with frequencies of 500kHZ to 40MHz.

 

Precis Microwave Generator Specifications:

  • 1.6kW microwave output at 2.45GHz
  • Operates from 200/208, 3-phase, 50/60Hz VAC
  • Coaxial and waveguide output options
  • Serial and analog communication
  • DeviceNet and EtherCAT communication options available
  • 19" rack mount design for ease of integration 

For more information, visit http://www.renosubsystems.com

Suggested Articles

A couple companies are starting to innovate power-through-the-air technology to power small IoT sensors for use cases in industrial settings.

Tech companies unable to generate cash will likely be out of business, clearing the market, says Siebel systems founder

Intel diversified and saw growth in 2019, unlike competitors focused heavily on memory