The WLI white light interferometer from Metrology Resource Co., Ortonville, MI, lets you measure surface topography without target damage. The system consists of a compact microscope-type head, a stand with X,Y stages, and related software. The episcopic microscope projects the target area of the sample onto a CCD camera. An interferogram is produced by the sample and reference image using Mirau objectives, allowing the system to evaluate the height differences of sample and reference from the generated interference fringes. Measuring range is ~100 µm using the piezo actuator and up to 12 mm using the integral motor.
White Light Interferometer from MRC
Metrology Resource Co.