Bosch Sensortec, Reutlingen, Germany, offers the SMD500 micromachined pressure sensor designed for consumer electronics. The piezoresistive sensor has a monocrystalline membrane and is supplied in a ceramic housing in a 5 by 5 by 1.6 mm LCC package. It is manufactured using advanced porous silicon membrane technology, resulting in a smaller size than conventional bulk micromachined sensors. Features include 3 µA avg. power consumption, high accuracy and linearity, and an I2C interface for connection to a microcontroller. The sensor can be used as both an altimeter and a barometer.
Small Pressure Sensor from Bosch Sensortec
Bosch Sensortec GmbH