The ITG-3200 from InvenSense Inc., Sunnyvale, CA, is a triaxial MEMS gyroscope on a single silicon chip suited for motion-based gaming and television 3D remote control menu navigation. F.S. range is up to 2000°/s and noise of 0.03°/s/√Hz. The sensor's 3-axis integration eliminates cross-axis interference and zero rate offset shift while digital output eliminates the need for an external high-resolution ADC. The MEMS structure design and smaller process node provide long battery life and a 4 by 4 by 0.9 mm package size. The 3 independent MEMS gyro structures on a single substrate maximize overall performance. Features include 3 integrated 16-bit ADCs, low-pass filters, embedded temperature sensor, and Fast Mode I2C serial interface.
Single-Chip Triaxial Gyro from InvenSense