MicroE Systems
The Mercury II 5000 from MicroE Systems, Bedford, MA, is a miniature optical encoder that provides up to ±20 nm accuracy (cyclic error), programmable resolution, and ranges from 5 µm to 1.2 nm. The A-quad-B output provides up to 5 m/s at 0.1 µm resolution and max. speed of 10 m/s. The sensor is 11 mm high and all electronics are integrated in the sensor, including programmable interpolation. Alignment tolerances are ±2° (rotational, around Z axis) and ±0.15 mm ride height tolerance. Adhesive-mount PurePrecision tape scales include stick-on optical index and limits; index is bidirectional and provides 1 LSB repeatability at all speeds.
Contact Info
Company:
MicroE Systems
Country:
United States (USA)
Phone number:
781-266-5750
Fax:
781-266-5112