The general-purpose, USB-powered MEMS/Sensor interface module from Si-Ware Systems, Cairo, Egypt, incorporates the company's SW-S100 custom inertial sensor interface ASIC and is intended for MEMS/sensor device characterization and system validation. The ASIC combines a programmable low-noise capacitive sensing front end, high-resolution ADC, digital processing, and an SPI interface. The module provides dual-channel, software-controlled arbitrary wave generation up to 500 Hz, dual-channel capacitive/impedance readout with programmable capacitance range and offset, and protection devices to prevent substrate sticking. It can be used to characterize MEMS structures, test functionality and performance of MEMS sensors, for prototype development and system validation, and as an OEM module for low-volume production.
MEMS/Sensor Interface Module from Si-Ware