Mass Flow Controllers from MKS Instruments

Click for larger image
MKS Instruments Inc.

The P and G Series multirange, multigas mass flow controller families from MKS Instruments Inc., Andover, MA, feature full digital control for fast response to set point over the operable device range. An embedded Web browser allows changes in gas type and F.S. flow. P Series MFCs have F.S. ranges from 5 sccm to 250 slpm (nitrogen equivalent), an integral pressure transducer, and are designed for critical mass flow applications such as those required in semiconductor and high-end MOCVD applications. The G Series is designed for solar, analytical, thin-film, and vacuum processes that require high performance over a 10 sccm to 50 slpm F.S. range. Most controllers are metal sealed and electropolished and offered in a range of interfaces, including RS-485, Profibus, and DeviceNet.

Contact Info

Company: MKS Instruments Inc.
Country: United States (USA)
Phone number: 978-645-5500
Fax: 978-557-5100

Suggested Articles

New sensors use the changing shape of nanowire combined with a piezoelectric material to produce enough energy to power the sensor.

Pleora Technologies sells a small interface to convert sensor data and video to packets, then send it over a 1 Gbps link.

Applications for Toposens’ “Bat Vision” TS3 sensors include navigation systems that mimic the echolocation techniques employed by bats and dolphins.