The P and G Series multirange, multigas mass flow controller families from MKS Instruments Inc., Andover, MA, feature full digital control for fast response to set point over the operable device range. An embedded Web browser allows changes in gas type and F.S. flow. P Series MFCs have F.S. ranges from 5 sccm to 250 slpm (nitrogen equivalent), an integral pressure transducer, and are designed for critical mass flow applications such as those required in semiconductor and high-end MOCVD applications. The G Series is designed for solar, analytical, thin-film, and vacuum processes that require high performance over a 10 sccm to 50 slpm F.S. range. Most controllers are metal sealed and electropolished and offered in a range of interfaces, including RS-485, Profibus, and DeviceNet.
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