Large Assembly and Test Facility Selects Rudolph NSX Series

FLANDERS, NJ -- Rudolph Technologies, Inc. (NASDAQ: RTEC), the leader in the high-growth market for back-end macro defect inspection, announced that a large OSAT (outsourced semiconductor assembly and test) company has placed orders for 14 NSX Series 320 Inspection Systems. The NSX Systems, scheduled for Q2 2012 installation, will be used for inspection in multiple steps during wafer-level chip-scale packaging (WLCSP) processes.

Nathan Little, vice president and general manager of Rudolph's Inspection Business, stated, "As confirmed by our strong order book for this new tool, packaging and test houses want to take advantage of the latest-generation inspection equipment to maximize throughput and productivity. The NSX320 System performs defect inspection, 2D bump metrology and acquires on-the-fly defect images for maximum productivity and flexibility. In addition, WLCSP requires flexibility for handling substrates in a variety of formats while collecting detailed defect and 2D metrology information during the inspection process; the NSX320 System incorporates whole wafer and film frame handling solutions to address this requirement."

The NSX320 System was selected after a competitive evaluation for its high speed and efficient, easy-to-use operating procedures, which delivered the highest productivity and lowest cost-of-ownership of all the tools considered.

"This order is evidence of the leading position the NSX320 Inspection System has established in the rapidly growing market for back-end inspection," Little added. "Rudolph's R&D investments in technology-leading products and the history we have with our back-end customers give us the ability to respond to the changing requirements in this important market segment."

The NSX320 System provides defect inspection for next-generation packaging processes at full-production throughput. Automatic recipe sharing between modules, smart wafer scheduling and in-use recipe editing make it an extremely efficient and productive inspection tool.

About Rudolph Technologies
Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The company's yield management solutions are used in both the wafer processing and final manufacturing of ICs, as well as in emerging markets such as LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization.

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