The MFA1100R from MEMSIC Inc., Andover, MA, is a MEMS-based gas flow sensor module that uses the company's monolithic thermal technology to determine flow rate. The sensing element is integrated with onchip signal processing and embedded software. The device features a flow range of 0–100 slpm with a 0.2 slpm startup rate, turndown ratio >500:1, accuracy ±1.5%, repeatability and hysteresis better than ±1.0%, and response time better than 100 ms. The module is compatible with a range of gases, consumes 3.0 mW under continuous operation, and has a –20°C to 60°C operating temperature range. Applications include industrial, medical, and residential gas flow applications.
Gas Flow Sensor Module from MEMSIC