C32 Series pressure sensors from EPCOS Inc., Iselin, NJ, have measurement ranges from 1–40 bar with 0.3% F.S. typical nonlinearity and are 1.6 by 1.6 mm2. The chip-scale pressure sensors have high cyclic stability with drifts of 0.1% F.S. under temperature stress. Chips are equipped with optimized bond pads which have spatially offset test-pad structures for wafer probers. The miniaturized C32 sensors allow glass prepackaging at chip level on both the top and bottom of the chip; the reference volume for absolute pressure measurements is formed by an additional glass substrate on the top side of the chip. Applications include automotive, industrial, and medical electronics.
Compact Pressure Sensor from EPCOS