3D Digital MEMS Compass from Baolab

Click for larger image
Baolab Microsystems S.L.

The BLBC3-D NanoCompass from Baolab Microsystems S.L., Terrassa, Spain, is a pure CMOS MEMS sensor that uses Lorentz force sensors to detect the Earth's magnetic field in 3D. The MEMS structure, which is a moveable aluminum plate suspended by springs, is constructed using the metal interconnect layers of the CMOS chip by etching away the inter-metal dielectric using vapor HF. When a current passes through the plate, it experiences a force proportional to the surrounding Earth's magnetic field and the resulting displacement is measured using capacitive detection between the moveable plate and fixed electrodes around it. The device provides 5° heading resolution and 13 bits per axis.

Contact Info

Company: Baolab Microsystems S.L.
Country: Spain
Phone number: +34 93-394-17-70

Suggested Articles

Samsung Electronics Co., Ltd., has added several software enhancements to its PCIe Gen4 solid state drive (SSD) series, improving SSD performance.

New Western Digital cards are built on 3D NAND

OmniVision's new OX01F10 SoC module provides automotive designers with a small form factor with low-light performance, ultra-low power and reduced cost.