Vibration/Motion Cancellation Systems Calm Semi Floors

Vibration/Motion Cancellation Systems Calm Semi Floors

Stage-Base 450, the company’s next generation of frame-mountable, active vibration and motion cancellation system, is designed to control building floor vibration in semiconductor facilities. The system is reportedly the first to integrate a serial-type architecture with voice coil technology into a system for aggressive moving-stage motion cancellation. It is intended as the primary vibration cancellation system for semiconductor tools that incorporate high-precision motorized X-Y stages.

Technical Manufacturing Corp.
Peabody, MA

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