Vertical Stage Features Industrial Load Capacity

MKS Instruments offers the Newport IDL280-Z20 vertical stage for industrial applications that require high load capacities. Based on a modular wedge design, the unit provides a minimum incremental motion (MIM) of 0.1 µm over 20 mm of travel. A precision ball screw drive with 2-mm pitch moves loads up to 500N with a speed of 5 mm/s.


Stiffness is 10µrad/N-m and, like all IDL stages, the IDL280-Z20 is fully compatible to the Newport XPS controller. It can also be combined with third-party industrial motion controllers. Upon request, Newport can provide custom-designed IDL280-Z vertical stages in other travels or sizes to meet.

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For additional information, check out the IDL280-Z20 Industrial Vertical Stage spec page.


MKS Instruments

Andover, MA


[email protected]


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