Piezo Transducer Provides Three Setpoint Relays

Piezo Transducer Provides Three Setpoint Relays
MKS Instruments Inc.

The 902B absolute piezo vacuum transducer integrates a MEMS-based Piezo sensor with a metal sealed, stainless steel 316 diaphragm and three integrated setpoint relays. It provides gas-independent vacuum pressure measurements between 0.1 and 1000 Torr. It features a high bakeout temperature of +100°C, ease of operation with an analog output and digital communications, an optional display, and multiple analog output emulations. Its compact, single unit design is mountable in any orientation for ease of installation. A datasheet is available at http://www.mksinst.com/docs/UR/902B-ds.pdf

MKS Instruments
Andover, MA
[email protected]

Contact Info

Company: MKS Instruments Inc.
Country: United States (USA)
Phone number: 978-645-5500
Fax: 978-557-5100

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