BEAVERTON, OR – Tektronix, Inc. announces the release of a major system software update (KTE version 5.6) for the Keithley S530 Parametric Test System that can reduce measurement speed by as much as 25%. This translates into increased wafer-level test throughput and directly improves the S530’s cost of ownership (COO) for semiconductor production and R&D departments.
Lower manufacturing costs and increased yields are key goals for semiconductor production companies who must also deal with evolving materials and device structures. In-line parametric test throughput and overall COO are directly related to the time it takes to complete all necessary measurements across semiconductor wafers. This new release of the Keithley Test Environment (KTE) software for the popular S530 steps up to these demands by delivering a significant improvement in test performance.
“When it comes to manufacturing and testing modern IC devices, driving down the cost-of-ownership is the name of the game,” said Mike Flaherty, general manager, Keithley product line at Tektronix. “With this latest release, we’ve taken the parametric test system with the best COO and reduced measurement time even further for improved in-line wafer test throughput. This will help our customers improve the bottom line and stay competitive in a fast-moving industry.”
The software upgrade for the S530 includes enhancements to system SMUs that reduce settling time associated with low current measurements. Faster current measurements result in faster overall system measurement speeds. New system measurement settings and streamlined software execution further improve system speed. The upgrade also includes integration of Tektronix’ newest Keithley digital multimeter (DMM) for faster low voltage and low resistance measurements.
S530 systems are optimized for use in production parametric test environments that typically accommodate a broad mix of products or wherever wide application flexibility and fast test plan development are critical. In addition to the 200V system configuration that is typically used for standard CMOS, bipolar, MEMS, and other relatively low voltage semiconductor processes, Keithley offers a unique 1kV version optimized for the difficult breakdown and leakage tests that GaN, SiC, and Si LDMOS power devices demand.
KTE version 5.6 and the new system DMM will begin shipping worldwide with S530s in October 2015.