The D6F-70 from OMRON Corp., Kyoto, Japan, is a 70 lpm MEMS flow sensor optimized for measuring the gas flow rate of fuel cell systems. In fuel cell systems, flow sensors are needed to control the flow rate of air as it reacts with hydrogen. Features include a flow range of 0–70 lpm, accuracy of ±3% F.S. at 25°C, operating temperature range of –10°C to 60°C, 1.0–5.0 VDC output, and a size of 84.6 by 32 by 30 mm. The sensor's new flow structure allows it to be almost the same size as the company's existing 50 lpm flow sensors and the detrimental effect of pump vibration has been reduced by 90% compared to existing models.
MEMS Flow Sensor from OMRON