MEMS-Based Force Sensor Debuts As Industry’s Smallest Size

MEMS-Based Force Sensor Debuts As Industry’s Smallest Size
Alps Electric Co. Ltd.

Trumpeted as the market’s smallest, the HSFPAR Series force sensor employs MEMS technology to back up that statement. The sensor was developed by applying to a semiconductor strain gauge original MEMS and packaging technologies built up over the years. It measures 2 mm x 1.6 mm x 0.66 mm and can detect stress as low as 0.01N. The HSFPAR Series is also available as a unit type with a FPC. Other features include a life of more than 1 million cycles. A datasheet is available at

Alps Electric Co. Ltd.
Santa Clara, CA

Contact Info

Company: Alps Electric Co. Ltd.
Country: United States (USA)

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