The MS5701 from Servoflo Corp., Lexington, MA, is a MEMS low-pressure sensor with an I2C or SPI digital interface. Available in either differential or gauge models, the sensor can measure pressures as low as ±2.5 in.H2O up to ±10 in.H2O in a differential version. The gauge model has ranges from 2 in.H2O to 20 in.H2O. Supply voltage is 1.8–3.6 V, power consumption is 1 µA, resolution is 0.001 mbar, and conversion is 0.54 ms. A 24-bit pressure and temperature output allows for integration to a microcontroller and the I2C or SPI interface communicates up to 20 MHz. Typical uses include HVAC, respirators, ventilators, CPAP and sleep apnea devices, leak detection, and liquid level metering.
Low Pressure Sensor from Servoflo