Sensirion AG, Zurich, Switzerland, offers its fourth generation CMOS-based fuel cell flow sensor chips for ultralow flow rates. The digital components can be calibrated for methanol on request and are designed to be integrated into fuel cell and life-science applications. The sensor element has been merged with memory and digital intelligence for linearization and temperature compensation on the same MEMS sensor chip. It can enable bubble detection and accurate measurement of very low liquid flow rates down to µl/min. and nl/min. The thermal sensors are noninvasive since the MEMS chip is mounted on the outside of a glass capillary and senses through the wall of the channel. The largest model available can measure flow rates up to 20 ml/min.
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