The SFM3000 mass flowmeter from Sensirion AG, Staefa, Switzerland, bidirectionally measures the flow of air and other nonaggressive gases at rates up to 200 slpm with high accuracy and speed. The sensor, based on the company's CMOSens technology, combines the sensor element, signal processing, and digital calibration on a single chip. Gas flow is measured by a thermal sensor element to provide an extended dynamic range and long-term stability. Features include a 14-bit digital signal at a 2 kHz update rate, digital 2-wire interface, and temperature compensation. Applications include high-volume medical devices, process automation, and burner control.
Digital Flowmeter from Sensirion