Angle Encoders Suit Semiconductor Sector

HEIDENHAIN ERP 1000 series angle encoders are said to deliver exceptionally high resolution, high speed, and high contamination resistance.  The encoders are useful for highly accurate measurement and positioning applications within semiconductor and metrology equipment.

 

Consisting of a glass disk bonded to a hub and a scanning unit that scans the fine graduation on the surface of the disk, the encoders are offered with four different size disks and segments.   The disks can have up to 63,000 lines with accuracy to +/- 0.9 arc seconds and up to 2600 RPM.  A reference mark is included, and multiple scanning units could be used to increase accuracy even further.

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The scanning units also have the latest custom ASIC HSP 1.0 that forces the stabilization of the signals through an advanced LED brightness control. When the scanning unit detects contamination, the LED intensity is increased to help increase the reflectivity and therefore reducing amplified noise. The result is a super stable encoder output that ensures high reliability. The scanning unit cable exit can also be ordered with either a straight-out configuration, or a 90-degree exit, both having left or right options as well, so squeezing into tight spaces is possible.

 

The scanning units come with either an analog 1 Vp-p or TTL electrical interface. The TTL versions can have up to 1000x interpolation, yielding an 252 million counts of resolution per 360° on the largest disk. HEIDENHAIN

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