Airborne Particle Sensor Improves Semi Fab Productivity

Air quality is a highly critical concern in semiconductor fabrication. The smallest, even microscopic, particulate     can taint a large run of devices. Therefore, highly accurate particle sensors and sensing systems are used to prevent, or at least maximally minimize, such pollution from entering the fabricating process. 


CyberOptics is on top of this concern, offering its next-generation, 300-mm WaferSense APS3 airborne particle sensor with ParticleSpectrum software.  The WaferSense APS3 accelerates equipment set-up and increases long-term yields in semiconductor fabs by wirelessly detecting, identifying and monitoring airborne particles in real-time. According to CyberOptics’, its airborne particle sensors have proven to deliver up to 90% time savings, 95% expense reduction, and up to 20x the throughput with half the manpower relative to legacy surface scan wafer methods. Also, the APS3 devices are even thinner and lighter than similar sensors.

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The APS3 solution incorporates ParticleSpectrum software, a touch-enabled interface with user-friendly functionality, making it simple to read in real-time. The sensor/software duo will be demonstrated at SEMICON Korea, January 31st through February 2nd at the Seoul COEX in booth # A418. CyberOptics will also unveil a new Airborne Particle Sensor designed for the flat-panel-display market. For further explorations, visit CyberOptics Semi Solutions page as well as the WaferSense Airborne Particle Sensor page. You can also gainfully peruse a WaferSense APS3 datasheet.


CyberOptics Corp.

Minneapolis, MN


[email protected]


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