Tom Adams

Tom Adams

Tom Adams is a consultant for Sonoscan Inc., Elk Grove Village, IL. For more information, contact Sonoscan Inc., Automated Inspection Division at 847-437-6400 or [email protected].

Stories by Tom Adams

Acoustic Imaging of MEMS Wafers and Devices

UHF ultrasound is a valuable tool for nondestructively evaluating the bonds and seals used in MEMS devices, identifying flaws and process problems at the wafer stage and facilitating process refinement.