Hongyuan Yang

Hongyuan Yang

Hongyuan Yang

Stories by Hongyuan Yang

A Better Test for MEMS Inertial Sensors

The mechanical response of MEMS inertial sensors (accelerometers and gyros) must be tested to verify the mechanical integrity and performance of the sensor element. One major obstacle to identifying inertial sensor defects early in the manufacturing process has been an inability to dynamically stimulate and sense the mechanical performance of the sensor at wafer level.